Research topics (Microsystems)

• Analysis of finite elements models of microsensors and microactuators for the simulation of the static and dynamic behaviour in presence of electrostatic coupling and geometrical nonlinearities
• Experimental validation of the dynamic and vibratory behaviour of MEMS (Micro Electro-Mechanical Systems) electrostatically actuated through experimental measures with optical, laser and interferometrical systems
• Experimental validation of the electrostatic behaviour of MEMS microsensors
• Numerical-experimental study of damping and of the coupling of the fluidic, electrostatic and structural domains
• Design activity of test structures for the characterization of microsystems and for the quality control during the fabrication of sensors and actuators
• Microsystem reliability analysis, design and realization of structures for the fatigue test
• Study and design of MEMS microsystems for the Energy Harvesting, that is the energy recovery from mechanic vibration and the power supply of wireless autonomous microsensors