Instruments and methods (Microsystems)
Microscope Leica DM 4000 M
The microscope can be employed with all the main illumination methods (brightfield, darkfield, phase contrast, polarization contrast, interference contrast); both the actuation of the Z drive and the stage motion are mechanically performed. The microscope mounts different objectives with a magnification factor from 5x to 100x. The microscope setting can be visualized on the control display.
System Probing Suss PM5
The instrument is employed to execute the complete analysis of wafers and substrates of dimension up to 15mm. The chips are positioned at the centre of the plate provided of positioning holes through which it’s possible the lock by means of a vacuum pump. On the microscope the digital videocamera JVC TK-C1480 with resolution 752X582 can be mounted, which is connectable with a PC. The lateral resolution of the microscope is 5 micron. The microstructures can be moved by means of an external power pack through the ProbeHeads PH100 Suss, that are adjustable needles mounted on pivoting moving arms, magnetically fixed. The same probes are employed on the Fogale Zoomsurf 3D instrument.
Fogale Zoomsurf 3D
The Fogale Zoomsurf is a high resolution optical profiling system for static and dynamic non-contact measures based on optical interferometry techniques. The intensity measured by each pixel of the CCD camera varies in function of the position of the specimen along the Z axis, derived from the difference in length between two light beams, one reflected by a reference mirror and the other reflected by the object surface. The resulting image shows interference fringes following the equal-height lines on the sample.
Roughness and surface profile can be measured with 0.1 nanometers accuracy, while lateral resolution is 0.6 micron. The instrument mounts a Nikon interchangeable objective from 2.5 x to 50 x. The dislocation of the three axes is performed through PC.
A frequency generator in the Fogale Zoomsurf 3D permits the reconstruction of the frequency spectrum between 100 Hz and 2 MHz. It’s possible also to reconstruct the modal shapes of the structures using the stroboscopic light. The obtained three-dimensional images are later computed with the software Fogale 3D viewer which permits various functions, among the others the use of filters, the tilt removal and the specimen dimension measure.
ProbeHeads PH100 Suss alimenting a silicon chip under the Fogale Zoomsurf 3D objective
ProbeHeads PH100 Suss alimenting a silicon chip under the Fogale Zoomsurf 3D objective
Polycrystalline silicon chip containing proof microstructures for the study of the squeeze film damping phenomenon.
Three-dimensional image of a set of microbeams obtained with the optical interferometry technique.
Software instruments
- Matlab/Simulink
- Ansys
- Adams
- Simpack
- Labview